1. The main and mini antechamber cannot replenish air
Reason: ①The air holes in the glove box leading to the main and mini antechamber may be blocked by plastic film, etc.; ②Whether the solenoid valve is not opened.
Method: ①Confirm the position of the air hole according to the direction of the pipeline, and clear the pipeline; ②Check the wiring and solenoid valve.
2. The main and mini antechamber cannot be pumped
Reasons: ①The air extraction holes in the main and mini antechamber are blocked by plastic film, etc. or the chamber door leaks; ②The antechamber door is not closed tightly, or the sealing ring of the main and mini antechamber is loose.
Method: ①According to the direction of the pipeline, confirm the position of the air hole and dredge the pipeline; ②Close the antechamber door and check the size of the sealing ring; ③Check whether the operating air pressure is too low (because the main antechamber air valve is a pneumatic valve).
3. The tank pressure continues to increase during cleaning
Reason: The cleaning valve is not opened, the intake pressure is too high, and the pipeline is not dredged.
Method: ①Ensure that the pipeline is unblocked, preferably not to be bent; ②When cleaning, the relative pressure in the tank will continue to be lower than 0.5 mbar.
4. The main valve of the purification column is defective
Reason: ①The working gas pressure is less than 0.5Mpa; ②The main valve signal feedback is faulty.
Method: ①Replace the working gas cylinder, or check the pressure of the auxiliary gauge of the pressure reducing valve at 0.5Mpa; ②Check the signal switch of the main valve.
5. The loop cannot be opened
Reason: low pressure or high pressure maintenance of the fan inverter.
Method: After the voltage is stable, shut down and restart after 1 minute.
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