ATTO10 – Affordable Glovebox Compatible, Sputtering or Thermal Evaporation Thin Film Deposition System

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ATTO10 – Affordable Glovebox Compatible, Sputtering or Thermal Evaporation Thin Film Deposition System

Atto10 glove box is a kind of proven glove box evaporation all-in-one machine. It is a rugged and versatile design standard solution. The system can be operated manually and automatically and has a wide range of deposition instrument options including: electron beam evaporators, RF and DC sputtering sources, low temperature organic evaporators and metal evaporators. There are also many system options available, such as quartz crystal monitoring, high vacuum load lock and heating, cooling, rotating or static sample stage. This system is integrated with the vacuum coating system and Lab2000 glove box system. The glove box is a box in a closed environment that is isolated from the atmosphere. Various assembly operations and other tasks can be performed inside the box through gloves. There is no water in the glove box. No oxygen, only filled with high-purity inert gas, to achieve seamless connection between the coating machine and the glove box, to solve the problem of coating products contaminated by water and oxygen molecules.


It not only ensures that the thin film evaporation is completed in the high vacuum evaporation chamber, but also the storage, preparation and detection of the samples after evaporation in a high purity inert gas atmosphere of the glove box.

The system has high vacuum pressure and evacuation time tests.

The industry’s best software control system with advanced programming capabilities, system flexibility,

It can be configured as a sputtering system, an electron beam system, an OLED system, a thermal evaporation system, or any combination of these processes.

A variety of optical and spectroscopic techniques can be integrated and the system integrated into a research glove box that requires an inert atmosphere.


In the semiconductor industry, MOCVD technology, microelectronic semiconductors, OLED / PLED development and production, lithium ion battery development and production, nanomaterial research, catalyst research, and research and development of perovskite solar cells