Since the 1980s, magnetron sputtering technology has developed rapidly, and its application field has been greatly promoted. Now magnetron coating technology has a pivotal position in the field of coating, and plays a great role in industrial production and science.

The system is integrated with a vacuum coating system and a glove box system, which can complete thin film evaporation in a high vacuum evaporation chamber, and store and prepare samples and test samples after evaporation in a high purity inert gas atmosphere in the glove box. . The multifunctional magnetron sputtering coating system is mainly used to prepare various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensing films, and functional films with special needs.

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.