In the manufacturing process of the OLED display panel, the organic film layer needs to be vacuum evaporated on the glass substrate, and this working step needs to be completed in a vacuum evaporation machine. Therefore, a glove box vapor deposition integrated machine is provided. This system is integrated by a vacuum coating system and a vacuum glove box system, which can complete thin film deposition in a high vacuum vapor deposition chamber, and in a glove box with high purity inert gas atmosphere The storage and preparation of samples and the detection of samples after vapor deposition are carried out.
Advantages of vacuum coating system: The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete system with a controllable environment atmosphere, eliminating organic The influence of unstable factors in the atmospheric environment during the preparation of area circuits ensures the preparation of high-performance, large-area organic optoelectronic devices and circuits.
The vacuum coating system is mainly used for experimental research and application of solar cell perovskite, OLED and PLED, and semiconductor preparation.