The coating machine is widely used. The coating machine mainly uses the characteristics of high bonding force between aluminum molecules and the plated material in a vacuum state, and is an equipment that guarantees the process of attaching the plated material to the coating. This equipment has high efficiency, high speed, stability and reliability. , High cost performance. Most of the existing vacuum coating machines use the drum coating method. The main drum in the cavity is set directly above the evaporation source. The main drum is easily contaminated during the operation. The main drum is surrounded by rollers, which is difficult to clean and accumulates the deposited aluminum for a long time. Film will reduce the surface finish of the main drum. Contamination and cleaning will damage the main drum, and eventually cause scratches on the coil, which will affect product quality. In addition, the drum coating method before the coil enters the main drum, it is not easy to fully develop This situation will lead to empty lines and wrinkles after evaporation, which not only affects product quality, but also causes material waste.

In order to overcome the above-mentioned shortcomings of the prior art, a glovebox vapor deposition integrated machine is provided. This system is integrated by a vacuum coating system and a glove box system. The thin film vapor deposition can be completed in a high vacuum vapor deposition chamber. The storage and preparation of samples and the detection of samples after vapor deposition are carried out under high purity inert gas atmosphere.

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete system with a controllable environment atmosphere, eliminating the organic large-area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.