The vacuum coating machine consists of a vacuum coating chamber, evaporation source, vacuum unit, fixture, evaporation power supply, control system and auxiliary devices.
Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many other types. The main idea is divided into evaporation and sputtering.
Main features of vacuum coating machine:
1. Equipped with quartz crystal or optical film thickness control instrument, which can realize automatic control of film thickness and coating and realize high-precision coating effect.
2. Equipped with RF ion bombardment device to purify the surface of the substrate, make the film and the surface of the substrate better adhesion, and improve the strength of the film.
3. It can vapor-deposit two or more different vapor-deposition materials at the same time, and can be made into composite film.
4. Easy to operate, ideal for production and scientific research.
5. It has the functions of over current, over voltage protection, water cut, under voltage protection and electrical interlock.