sample platform of the vacuum evaporation system can only complete the
evaporation and film formation of organic and metal sources, and can only make
4 samples at one time. Although the magnetron sputtering system and the
homogeneous film-forming system can also be connected to the evaporation
chamber through a transition chamber, such equipment cannot place the magnetron
sputtering system inside the evaporation chamber, and the mechanical manufacturing
is complicated and inefficient. In addition, most machines cannot prepare
multiple samples at one time. After the evaporation of each batch of samples,
the atmosphere of the evaporation chamber needs to be destroyed to reload the
samples, and then re-evacuate. As a result, researchers need to spend longer
experimental time to obtain the experimental environment and perform relatively
complicated operating steps, and the samples prepared for each batch are also
different, resulting in the consequences of production lag and reduced
scientific research efficiency.
this reason, in the prior art, the sample platform of the vacuum evaporation
system can only complete the evaporation and film formation of organic and
metal sources, and can only produce a small number of samples at one time, and
the production efficiency is low. machine. This system is integrated by vacuum
coating system and glove box system. It can complete thin film evaporation in a
high vacuum evaporation chamber, and store and prepare samples in a high purity
inert gas atmosphere in the glove box.
combination of evaporation coating and glove box realizes the fully enclosed
production of evaporation, packaging, and testing processes, so that the entire
film growth and device preparation process is highly integrated in a complete
controllable environment atmosphere system, eliminating the organic large area
circuit preparation process The influence of unstable factors in the
atmospheric environment guarantees the preparation of high-performance, large-area
organic optoelectronic, devices and circuits.
are mainly used in solar cell perovskite, OLED and PLED, semiconductor
preparation and other experimental research and application.