ATTO10-O High Vacuum Organic Evaporation Coating Machine

Application areas:

It is suitable for the preparation of metal electrodes, perovskite solar cells, OLEDs, semiconductor films, oxide films, organic films, etc. It can be used in scientific research units for research on new materials and new process films, and can also be used in small batches and pilot production or Test work before mass production.



Request Quote

FREE:888-999-6186
CALL:541-666-2111

Why Choose Us

The Nichwell Solutions advantage.

 

When you select Nichwell Solutions as your technology provider, you'll be placing your IT infrastructure in the hands of experienced, trained professionals. We take a different approach and the results are clear. People love our team and the services we provide.

Knowledgeable Experts.

A certified staff of technicians and engineers.

We lower your support costs by correctly diagnosing and fixing issues the first time and by providing effective preventive maintenance to help you avoid expensive downtime and repairs. Our 100% Nicehwell-based team consists of experienced, seasoned professionals certified by Microsoft, Citrix, Dell, VMWare, Veeam and CompTIA. We are your IT department.

Custom-Built Solutions

Dedicated account representative and support system for your organization

Our sales team is not influenced by commissions, manufacturer incentives or quotas because that's not how we do business. We explore your operations, carefully evaluate your security, establish your monitoring and technology needs, then provide a tailored proposal. Because our only interest is a satisfied long term client, you can be sure we're on your side and our solutions will always revolve around you.

No Outsourcing

Every service is owned, managed and backed by our in-house professionals.

When you purchase a re-sold service and then that service has a problem, response and resolution times can suffer. That's why we host our own servers in carrier-class, US-based data centers and we don't resell 3rd party hosted services to our clients. We're control freaks. Say goodbye to delays, excuses, finger pointing and blame-games. If we offer it, we support it. It's as simple as that.

Honest Pricing

Relationships are more important than a quick buck

Nichwell Solutions has a high client retention rate. This is partly because people love our team, but it's also because we take the time to assess your needs and propose affordable solutions that grow as you grow. Our clients view us as a partner, not a vendor. We help you reach your goals, we help you understand and leverage technology, and we believe in the benefits of building lasting relationships.

Client Service

The key to our client service is our seamless integration of deep industry and functional expertise with tools and capabilities to support execution and make change happen—on a global scale.

ATTO10-O High Vacuum Organic Evaporation Coating Machine

Features

Chamber 304L stainless steel chamber: φ400mm × H450mm

The room comes standard with up to ten spare ports based on system configuration

Vacuum test runs to 10 -8 Torr

Thermal evaporation (up to 4 independent metal evaporation boats)

Magnetron sputtering source (up to 4 2 ", 3" sources)

Electron beam evaporation source (4 crucibles 8cc, 8 crucibles 12cc, 6 crucibles 20cc)

Organic deposition sources (up to four)

The above configurations can be installed in combination.

Custom configurations available on request

Equipment composition:

The equipment is mainly composed of organic / metal evaporation deposition chamber, vacuum exhaust system, vacuum measurement system, evaporation source, sample heating temperature control, electrical control system, gas distribution system and other parts.

Technical Parameters 

Vacuum coating room

Description

Material: Stainless steel 1.4301 (SUS type 304), thickness 5mm, all welding seams are connected by argon arc automatic welding technology; mirror polished inner surface, three treatments on outer surface.

Size: Φ400 × H450mm;

Volume 0.056m³Observation window

The door is equipped with a glass observation window (including anti-pollution baffle), which is convenient for observing the working situation at work.

Conform to the national standard of X-ray protection

  Extra vacuum   

≤6. 67x10-5pa (2×10-7Torr)(after baking and degassing)

Vacuum recovery time   

≤6.67X10-4 pa(after baking and degassing)

InterfaceThree standard interfaces (φ200), expand the installation of molecular pumps and plug-in valves;Four standard interfaces (CF35) are reserved for extended functions;  Illumination   LED lighting is located on the side of the vacuum chamber for easy observation of the interior of the vacuum chamberLeak rate     

The leak detection shall be carried out according to GB T 32218-2015, and the final acceptance test shall be conducted according to the standard of ≤1x10-10PaL / s.

 Vacuum systemDescription 

Using "molecular pump + mechanical pump" high vacuum system:

Molecular pump 

Pumping speed: 1200L / S, a true quasi-oil-free vacuum system, using down-pumping to avoid the pumping weakness of the molecular pump and improve the pumping speed; the molecular pump is guaranteed for 5 years and provides direct replacement service for damage.

  * Optional imported molecular pump

 Vacuum pump  

Specifications: Rotary vane vacuum pump, equipped with oil mist filter, with gas ballast control

Flow rate: 36 m³ / h (21 cfm), double substrate, vacuum

* Optional dry vacuum pump

Operating voltage  AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional)Pump speed   

Draw from the atmosphere to 9 × 10-4Pa≤30min (expose the atmosphere for a short time, start to evacuate after rushing into dry nitrogen)

Valve

Main valve: CC-200, high-vacuum electric linkage plug-in valve;

Front stage valve / bypass valve: GDQ-40 high vacuum pneumatic baffle valve;

Vacuum measurement

"Two lows and one high" (two resistance gauges measure low vacuum, one ionization gauge measures high vacuum) Digital composite vacuum gauge, measuring range from 1×105Pa to 1×10-5Pa; it can be displayed and controlled by PC, which can be realized Interlocking operation.

* Optional imported wide-range vacuum transmitter

Vacuum measurement   

Partially adopts metal seal and partly adopt fluorine rubber ring seal;

Substrate stage DescriptionThe sample table is made of 304 stainless steel, the substrate is placed directly above the evaporation source (full automatic lifting function), and the tooling is designed according to the size of the substrate to facilitate the user to fix the sample. Customizable high-precision etching mask plate;SpinThe stepping motor is used to control the rotation, the magnetic fluid is sealed, the motor and the magnetic fluid are coaxial, and there will be no loss of rotation or crawling. The stepper motor is accurately controlled and the speed range is continuously adjustable from 0-30rpm;LiftAdopt stepper motor to control rotation, magnetic fluid seal, precise control, height range 0-100mm continuously adjustable;MaskDrawer-type structure, carrying the largest sample less than 120 × 120mm, equipped with Japanese SMC pneumatic substrate baffle, electric linkage automatic control.

Coating source  

Organic evaporation source

Structure

Adopt organic sublimation beam source furnace, each steaming material can be equipped with 5CC, the upper part has a heat shield to prevent the heat of the evaporation boat from radiating upward, and there is a temperature interference device between the evaporation sources (easy to take and place, convenient for cleaning and maintenance).

Evaporation temperaturePID intelligent temperature control, can be heated to 600 ℃, temperature control accuracy ± 1 ℃;

Number

2 sets

Organic evaporation power 

Outpower

0~800W

ControlRS-485 interface, power supply is continuously adjustable from 0 to maximum power.

Number

2 sets

Control SystemDescriptionAdopt windows operating platform and cotrl2000 control system, and adopt IPC + network technology to realize parameter setting of main components of the whole machine, implement real-time monitoring and intelligent diagnosis of faults, and automatic monitoring of film thickness. There are two modes of automatic and manual control. In addition to taking and placing samples, all other operating processes are controlled by software on the PC; provide a friendly man-machine interface such as vacuum system, process setting, gas filling and degassing system; parameters can be set on the industrial control computer through the recipe to achieve Setting, storage and printing of equipment parameters.Specification

It can effectively solve the accuracy, stability and reliability of the coating.

Perfect program interlocking, complete anti-misoperation design and protection; system abnormalities such as water shortage, over-current and over-pressure alarm and corresponding protection measures are implemented.

It adopts rich I / O interface design to fully meet the functional requirements of expansion and external devices.

The display controls the door opening / closing of the coating machine.

Coating process, procedure, film thickness, convenient and save printing.

Film thickness monitoring and control system

DescriptionA quartz crystal film thickness controller is used, a water-cooled film thickness probe is installed near the substrate table, and the industrial computer is connected. The film thickness meter is used to monitor the coating rate and final thickness in real time, and the accuracy can reach ± 1A (0.1nm). Real-time information is fed back to the industrial control machine. If the coating thickness reaches the set thickness, the power can be automatically controlled to stop the coating to achieve the purpose of automatic control of the film thickness. RangeMonitoring thickness range: 1Å ~ 99µ9999Å, resolution 1Å; monitoring rate range: 0.1Å ~ 9999.9Å.S / s, resolution 0.1Å

Specification

The coating process, process, and film thickness are all set on the PC, which can realize automatic control of the whole process. The coating process can be set on the PC and the data can be recorded.

Cooling system

Description 

The cooling water circuit is 8 inlets and 8 outlets, and the total water inlet is controlled by a hydraulic relay.

The total inlet and outlet water is connected to a 1P refrigeration cycle water machine, and the temperature control range is 10-25 ℃. Provide stable refrigerated circulating water to targets, metal sources, molecular pumps, and magnetic fluids to ensure stable operation of the equipment.

Optional equipment

Substrate stage HeatingThe use of special vacuum armored heating wire avoids the problems of traditional heating elements contaminating the vacuum chamber, contaminating the substrate, short life, and requiring frequent maintenance. The heating temperature is: room temperature ~ 300 ℃, the temperature control adopts imported Japan Shiden Electric PID intelligent temperature controller, the temperature control accuracy is ± 1 ℃.Water coolingA stepper motor is used to control the drive rotation, dynamic sealing, and one water flow in and one out.Liquid nitrogen coolingPatented product:Adopt stepper motor to control the rotation, the magnetic fluid is sealed, the motor and the magnetic fluid are coaxial, the measured temperature is -160 ℃Select film coatingPatented product:The film can be selected at random, and the home position can be automatically transferred and aligned, and the deposition height can be adjusted.Automatic coordination coatingPatented product:Stepless selection of film selection function, automatic transfer and alignment of homing, adjustable deposition heightStepless flip and rotationPatented product:Realize the horizontal and vertical rotation of the substrate, stepless rotation and heating, can achieve high uniformity coating.

Vacuum baking / degassing  

Double heater design;

Power: 1200 W;

Mounting flange: CF35;

Quickly degas the vacuum chamber to improve the vacuum;

The baking time is shorter than the baking oven and heating belt;

Sample compartment

 Door opening structure, size is about ø200 X 300mm

Vacuum system: mechanical pump, molecular pump, valve

Ultimate vacuum: ≤6.67X10-4 pa (after degassing after baking).

Vacuum recovery time: 30 minutes can reach 6. 6x10-3 Pa  (the system is exposed to the atmosphere for a short time and filled with dry nitrogen to start)

Chamber heatingThe vacuum chamber is equipped with a heating system, the temperature is 200 ℃, and the temperature control is ± 1 ℃Cooling system

The cooling water path is 8 in and 8 out, and the total water intake is controlled by a water pressure relay.

The total inlet and outlet water are connected with 1P refrigeration circulating water machine, and the temperature control range is 10-25 ℃. Provide stable cooling and circulating water to the metal source, molecular pump and magnetic fluid to ensure the stable operation of the equipment.