SQC-310 Thin Film Deposition Controller

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SQC-310 Thin Film Deposition Controller

Bright color LCD display-available in English

Standard RS-232 and USB (optional RS-232 and Ethernet)

Features Quick Setup menu, 6 context-sensitive buttons, and a simple parameter setting knob for easy setup and operation

Windows® programs for developing, testing, and downloading processes, and Windows programs for recording instrument data to a PC for process analysis and quality control

Precise process control, especially for low deposition rates, with a measurement rate of 10 readings per second and a measurement resolution of ± 0.03 Hz

Storage capacity up to 100 processes, 1000 layers of film, 50 types of film materials

Monitor source materials with single or multiple sensors, providing accurate source distribution monitoring

Technical parameter

Digital input / relay


QCM input2 (4 optional)4
Measurement frequency rangeAdjustable:
       1.0 MHz minimum
       6.5 MHz maximum
       1.0 MHz minimum
       6.5 MHz maximum
Frequency resolution (1)± 0.012 Hz± 0.012 Hz
Thickness and rate resolution / measurement (2)±0.015 ű0.015 Å
Frequency stability± 2 ppm total, 0 to 50C± 2 ppm total, 0 to 50C
Measurement cycle0.10 to 1.0 s (adjustable)0.10 to 1.0 s (adjustable)
Rate display0.01 Å/sec0.01 Å/sec

Storage100 processes, 1000 layers, 50 films100 processes, 1000 layers, 50 films
Control output
2 (4 optional)4
Output singal
± 0 to 10 VDC, 15 bits± 0 to 10 VDC, 15 bits
8/8 (16/16 optional)16/16
Digital input
5 VDC non-isolated5 VDC non-isolated
RelaySPST Form 1A, 30V, 2A maxSPST Form 1A, 30V, 2A max
Standard RS-232 and USB (RS-232 and Ethernet optional)Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote power controlOptional (IPN 782-900-017)Optional (IPN 782-900-017)

Ty1/4 VGA 320 x 240 active matrix color LCD1/4 VGA 320 x 240 active matrix color LCD
Rate, deviation, power or full screen numericRate, deviation, power or full screen numeric

Power100-240 VAC, 50/60 Hz, 25W100-240 VAC, 50/60 Hz, 25 W
ComplianceCE, RoHSCE, RoHS
Windows® software
Housing / installation5 1/4” half-rack5 1/4” half-rack

(1) Resolution of 0.25 second measurement interval
(2) Tool / density = 100 / 1, base frequency = 6 Hz, 0.25 second measurement interval