ATTO3-OG High Vacuum Organic Thermal Evaporation Coating Machine & Glove Box

ATTO3 is a proven, robust and versatile design standard solution. The system can be operated manually and automatically, with a wide range of deposition instrument options, including: RF and DC sputtering sources, low temperature organic evaporators and metal evaporators. There are also many system options available, such as quartz crystal monitoring, high vacuum load lock and heating, cooling, rotating or static sample stage.

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The Nichwell Solutions advantage.


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ATTO3-OG High Vacuum Organic Thermal Evaporation Coating Machine & Glove Box


Box 304L stainless steel or glass chamber: Φ300mm × 415mm high (internal dimensions)

The room comes standard with up to five spare ports based on system configuration

Vacuum test runs to 10 -8 Torr

Thermal evaporation (up to 2 independent metal evaporation boats)

Magnetron sputtering source (up to 2,  2 ", 3" sources)

Organic deposition sources (up to two)

The above configurations can be installed in combination.

Custom configurations available on request


Material: Stainless steel 1.4301 (SUS type 304), thickness 3 mm

Dimensions: 1200mm (L) x 750mm (W) x 900mm (H)

Volume0.8 m³
Front window

Panel: 8 mm thick safety tempered glass or 10 mm thick polycarbonate (optional)

Dimensions: 442"(L)x330"(H) or 1123mm (L) x 839mm (H)

Glove port

Hard aluminum alloy material or polyoxymethylene material (optional)

Caliber 86.6"(220 mm), O-ring seal


Material: Butyl rubber

Thickness: 0.4 mm or 0.8mm (available for selection)

FilterOutlet and inlet filters, filtering
IlluminationLED lighting is located on the top of the front window
Leak rate

The leak detection is based on the oxygen method and the pressure change method in the ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Box Room-Part 2: Sealing Classification and Related Inspection Methods", Carry out the final acceptance test according to the standard of first-class tightness

GP20 gas purification system

Automatic removal of H2O and O2

Single purification column system, automatic regeneration (optional GP200 double purification column)

Closed gas circulation line

Use voltageAC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional)
Working gas

Working gas: N2, Ar, He (purity ≥99.999%)

Regeneration gas: H2 accounts for 5% -10%, and the rest is working gas (purity ≥99.999%)

Vacuum pump

Specifications: Rotary vane vacuum pump, equipped with oil mist filter, with gas ballast control.

Flow rate: 12 m³ / h (7 cfm), double substrate, vacuum degree

Circulation unit

Oil-free high-speed fan

Air volume: 80 m³ / h

ValveKF40 high vacuum valve
Leak rate

The leak detection is based on the oxygen method and the pressure change method in the ISO 10648-2: 1994 / EJ / T 1096-1999 "Sealed Box Room-Part 2: Sealing Classification and Related Inspection Methods" Carry out the final acceptance test according to the standard of level 1 tightness

Control cabinet size

 236"(L)x315"(D)x342"(H); 600mm(L) x 800mm(D) x 870mm(H)


Main Antechamber


Stainless steel type 304 (1.4301), thickness 3 mm

Sizeφ360mmx600mm(L) (φ142"x236"(L))or φ390mmx600mm(L)(φ153"x236"(L))(optional)

Vacuum degree

-2 mbar

Mini antechamber


Stainless steel type 304 (1.4301), thickness 2 mm

Sizeφ150mm x 330mm(L)(φ59" x 130"(L))

Vacuum degree

-2 mbar

Cleaning system
DescriptionSet the corresponding time and pressure, the system can automatically replace the gas box.


Oxygen Analyzer


205 mm(L) x 80 mm(W) x 60 mm(H)(81"(L) x 31"(W) x 24"(H))

Measuring range

0-1000 ppm

Other oxygen analyzers

GE oxy.IQ™ Oxygen Transmitter

Moisture Analyzer


205 mm(L) x 80 mm(W) x 60 mm(H)

Measuring range

0-500 ppm

Other water analyzers

GE VeriDri™ Dew-Point Transmitter

Solvent purification system


Material: Stainless steel 1.4301 (SUS type 304), thickness 3 mm

Internal dimensions: 220mm (Φ) x 450mm (H)(87"(Φ) x 177" (H))

Premium activated carbon

Optional equipment


Independent control system, integrated on the side panel of the cabinet, temperature -35 ℃, volume 18L or 32L optional

Main body 304 stainless steel plate, 5 layers of variable compartment

R404 environmentally friendly refrigerant, imported

Heating cabinMain antechamber configuration heating system, the temperature is 200 ℃, temperature control ± 1 ℃

Vacuum coating room


Glass bell jar +304 stainless steel vacuum chamber base

Size: Φ300 × H415mm( Φ118" × H163");

Vacuum system

Using "molecular pump + mechanical pump" high vacuum system:

Molecular pump

Pumping speed: 1200L / S, a true quasi-oil-free vacuum system, using down-pumping to avoid the pumping weakness of the molecular pump and improve the pumping speed; the molecular pump is guaranteed for 5 years and provides direct replacement service for damage.

  * Optional imported molecular pum

Vacuum pump

Specifications: Rotary vane vacuum pump, equipped with oil mist filter, with gas ballast control

Flow rate: 36 m³ / h (21 cfm), double substrate, vacuum

* Optional dry vacuum pump

Operating VoltageAC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional)
Pumping speed

Pumping from the atmosphere to 9 × 10-4Pa≤30min (exposure to the atmosphere for a short time, flushing with dry nitrogen and starting pumping)


Front stage valve / bypass valve: GDQ-40 high vacuum pneumatic baffle valve;

Vacuum measurement

"Two lows and one high" (two resistance gauges measure low vacuum, one ionization gauge measures high vacuum) Digital display compound vacuum gauge, measuring range from 1 × 105Pa to 1 × 10-5Pa; displayed and controlled by PC, can be realized Operation interlocking linkage.

* Optional imported wide range vacuum transmitter

Vacuum measurement

Part adopts metal seal, part adopts fluorine rubber ring seal;

Coating source

Metal evaporation source


Using water-cooled copper electrode + evaporation boat structure, there are anti-pollution partitions between the evaporation sources and each source is equipped with a positioning baffle, intelligent PC control;

Evaporation temperatureRoom temperature 0 ~ 1300 ℃

Metal evaporation power supply

Output Power

0 ~ 3000W, the current is regulated by inverter, which is stable and reliable. The power of the power supply is continuously adjustable from 0 to the maximum power.

ControlRS-485 interface, power supply is continuously adjustable from 0 to maximum power.


2 sets, automatic switching control

Control system
DescriptionAdopt windows operating platform and cotrl2000 control system, and adopt IPC + network technology to realize parameter setting of main components of the whole machine, implement real-time monitoring and intelligent diagnosis of faults, and automatic monitoring of film thickness. There are two modes of automatic and manual control. In addition to taking and placing samples, all other operating processes are controlled by software on the PC; provide a friendly man-machine interface such as vacuum system, process setting, gas filling and degassing system; parameters can be set on the industrial computer through the recipe to realize the process and process Setting, storage and printing of equipment parameters.

It can effectively solve the accuracy, stability and reliability of the coating.

Perfect program interlocking, complete anti-misoperation design and protection; system abnormalities such as water shortage, over-current and over-pressure alarm and corresponding protection measures are implemented.

It adopts rich I / O interface design to fully meet the functional requirements of expansion and external devices.

The display controls the door opening / closing of the coating machine.

Coating process, procedure, film thickness, convenient and save printing.

Film thickness monitoring and control system

DescriptionA quartz crystal film thickness controller is used, a water-cooled film thickness probe is installed near the substrate table, and the industrial computer is connected. The film thickness meter is used to monitor the coating rate and final thickness in real time, and the accuracy can reach ± 1A (0.1nm). Real-time information is fed back to the industrial control machine. If the coating thickness reaches the set thickness, the power can be automatically controlled to stop the coating to achieve the purpose of automatic control of the film thickness .
RangeMonitoring thickness range: 1Å ~ 99µ9999Å, resolution 1Å; monitoring rate range: 0.1Å ~ 9999.9Å.S / s, resolution 0.1Å


The coating process, process, and film thickness are all set on the PC, which can realize automatic control of the whole process. The coating process can be set on the PC and the data can be recorded.

Cooling system

Cooling system

The cooling water path is 8 in and 8 out, and the total water intake is controlled by a water pressure relay.

The total inlet water and outlet water are connected with 1P refrigeration circulating water machine, and the temperature control range is 10-25 ℃. Provide stable cooling and circulating water to the metal source, molecular pump and magnetic fluid to ensure the stable operation of the equipment.

Other instructions
Product certification

ISO9001 certification, CE certification, UL certification

Application considerationsFor details, please refer to the instruction manual for danger, warning, caution, etc.